Электронно-лучевая технология в изготовлении микроэлектронных приборов / (Գրառման հմ. 28112)

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000 -LEADER
fixed length control field 01125nam a2200217 u 4500
001 - CONTROL NUMBER
control field 000345300
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240715052609.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 040621s1984 ||| r 000 0 rus d
041 1# - LANGUAGE CODE
Language code of text/sound track or separate title rus
Language code of original eng
245 00 - TITLE STATEMENT
Title Электронно-лучевая технология в изготовлении микроэлектронных приборов /
Statement of responsibility, etc. Дж.Р. Брюэр и др. ; Под ред. Дж.Р. Брюэра ; Пер. с. англ. Ф.П. Пресса.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Москва :
Name of publisher, distributor, etc. Радио и связь,
Date of publication, distribution, etc. 1984.
300 ## - PHYSICAL DESCRIPTION
Extent 336 с. :
Other physical details ил.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Библиогр.: с. 316 - 328.
534 ## - ORIGINAL VERSION NOTE
Introductory phrase Оригинал на англ. :
Title statement of original Electron-Beam technology in Microelectronic Fabrication /
Main entry of original Edited by George R. Brewer -
Publication, distribution, etc. of original New York : Academic Press : 1980
650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Изготовление микроэлектронных приборов
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Брюэр, Джордж Р.
Relator term авт.
Relator code aut
Relator term ред.
Relator code edt
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Гринич, Джеймс С.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Херриот, Дональд Р.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Пресс, Ф.П.
Relator term пер.
Relator code trl
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